An optical scanning apparatus includes an in-plane vibratory mass platform having at least one diffraction grating formed thereon as the scanning element, at least one flexure structure that connects the mass platform to at least one fixed support, and at least one driving actuator that drives the mass...http://www.google.com/patents/US7542188?utm_source=gb-gplus-sharePatent US7542188 - Optical scanning using vibratory diffraction gratings
