The construction of a film on a wafer, which is placed in a processing chamber, may be carried out through the following steps. A layer of material is deposited on the wafer. Next, the layer of material is annealed. Once the annealing is completed, the material may be oxidized. Alternatively, the material...http://www.google.com/patents/US6500742?utm_source=gb-gplus-sharePatent US6500742 - Construction of a film on a semiconductor wafer
