A metal particle detecting sensor (10), having a simple structure, can perform in-line analysis for metal particles in fluid and also can precisely estimate or detect the number of metal particles for each particle size. Metal films (1) and insulating films (2) are alternately laminated one upon another,...http://www.google.com/patents/US5596266?utm_source=gb-gplus-sharePatent US5596266 - Metal particle detecting sensor, metal particle detecting method and metal particle detecting apparatus
