A semiconductor device comprising: a storage electrode having a side wall forward tapered; a capacitor dielectric film formed on the side wall of the storage electrode; and a plate electrode formed on the side wall of the storage electrode with the capacitor dielectric film interposing therebetween,...http://www.google.com/patents/US6710387?utm_source=gb-gplus-sharePatent US6710387 - Semiconductor device and method for fabricating the same
