A topographic head for profilometry and AFM supports a central paddle by coaxial torsion bars projecting inward from an outer frame. A tip projects from the paddle distal from the bars. The topographic head's frame, bars and paddle are monolithically fabricated by micromachining from a semiconductor...http://www.google.com/patents/US6272907?utm_source=gb-gplus-sharePatent US6272907 - Integrated silicon profilometer and AFM head
