A new DMD device and method for non-contacting edge-coupled hidden hinge geometry is disclosed, whereby no physical contact between the mirror or underlying yoke and landing pads at the surface of the CMOS substrate is required. This eliminates the problem of "sticking" mirrors found in conventional...http://www.google.com/patents/US20010053016?utm_source=gb-gplus-sharePatent US20010053016 - Digital micromirror device and method for non-contacting, edge-coupled hidden hinge geometry
