Carrier assemblies, polishing machines with carrier assemblies, and methods for mechanical and/or chemical-mechanical polishing of micro-device workpieces are disclosed herein. In one embodiment, a carrier assembly includes a head having a chamber, a magnetic field source carried by the head, and a magnetic...http://www.google.com/patents/US20050026544?utm_source=gb-gplus-sharePatent US20050026544 - Carrier assemblies, polishing machines including carrier assemblies, and methods for polishing micro-device workpieces
