Apparatus and methods are disclosed for performing highly precise mark detection by obtaining a large signal as a result of the efficient capture of secondary electrons (SEs) emitted from a surface of a specimen. A charged-particle beam is directed at a location (e.g., a mark) on the specimen (e.g.,...http://www.google.com/patents/US5981947?utm_source=gb-gplus-sharePatent US5981947 - Apparatus for detecting or collecting secondary electrons, charged-particle beam exposure apparatus comprising same, and related methods
