A main gas inlet pipe is provided in the vicinity of the bottom of a reaction tube, from which main gas inlet pipe is supplied a monosilane gas and a phosphine gas. A first and a second sub-gas inlet pipes also are provided, having their extreme ends opened, the sub-gas inlet pipes being provided with...http://www.google.com/patents/US5925188?utm_source=gb-gplus-sharePatent US5925188 - Film forming apparatus
