In a substrate, a portion for forming wiring extending to a connection terminal is provided with a recess. The connection terminal and the wiring are covered by an interlayer insulating film, and an opening is provided in a portion corresponding to the connection terminal. Thereby, a difference in level...http://www.google.com/patents/US6528822?utm_source=gb-gplus-sharePatent US6528822 - Electro-optical device
