A spatial light modulator is disclosed, along with methods for making such a modulator. The spatial light modulator comprises an array of micromirrors each of which comprises a deflectable and reflective mirror plate. For enabling the deflection of the mirror plate, incisions are made within the area...http://www.google.com/patents/US6980349?utm_source=gb-gplus-sharePatent US6980349 - Micromirrors with novel mirror plates
