A method and system are presented for determining a line profile in a patterned structure, aimed at controlling a process of manufacture of the structure. The patterned structure comprises a plurality of different layers, the pattern in the structure being formed by patterned regions and un-patterned...http://www.google.com/patents/US8023122?utm_source=gb-gplus-sharePatent US8023122 - Method and system for measuring patterned structures
