Composite TiO.sub.2 /Ta.sub.2 O.sub.5 films by in-situ sequential CVD deposition are presented for a storage capacitor of a three-dimensional cell in DRAM applications. The capacitor with the Ta.sub.2 O.sub.5 /TiO.sub.2 /Ta.sub.2 O.sub.5 alternating layer structure has comparable leakage...http://www.google.com/patents/US5841186?utm_source=gb-gplus-sharePatent US5841186 - Composite dielectric films
