A MEM tunneling gyroscope assembly includes (1) a beam structure, and a mating structure defined on a first substrate or wafer; and (2) at least one contact structure, and a mating structure defined on a second substrate or wafer, the mating structure on the second substrate or wafer being of a complementary...http://www.google.com/patents/US6975009?utm_source=gb-gplus-sharePatent US6975009 - Dual-wafer tunneling gyroscope and an assembly for making same
