High quality epitaxial layers of monocrystalline materials can be grown overlying monocrystalline substrates such as large silicon wafers by forming a compliant substrate for growing the monocrystalline layers. An accommodating buffer layer comprises a layer of monocrystalline oxide spaced apart from...http://www.google.com/patents/US20030017690?utm_source=gb-gplus-sharePatent US20030017690 - Apparatus and method for attaching integrated circuit structures and devices utilizing the formation of a compliant substrate to a circuit board
