The present invention provides a method for manufacturing a thin film transistor (TFT) array panel by forming a gate line having a gate electrode on an insulating substrate; sequentially depositing a gate insulating layer and a semiconductor layer on the gate line; forming a drain electrode and a data...http://www.google.com/patents/US7605091?utm_source=gb-gplus-sharePatent US7605091 - Etchant for conductive materials and method of manufacturing a thin film transistor array panel using the same
