A spectrophotometer, reflectometer, ellipsometer polarimeter or the like system having a detector means for independently intercepting electromagnetic radiation reflected from a sample frontside or backside, and methodology for pursuing less correlated determination of refractive index and thickness...http://www.google.com/patents/US7385698?utm_source=gb-gplus-sharePatent US7385698 - System and method of selectively monitoring sample front and backside reflections in ellipsometer and the like systems
