A method for aligning a probe relative to a supporting substrate defining a first planar surface, an edge, and a first crystal plane includes the steps of masking the surface of the substrate to define an exposed area on the first surface at the edge; and etching, using an etch reagent, a recess in the...http://www.google.com/patents/US7936176?utm_source=gb-gplus-sharePatent US7936176 - Method for providing alignment of a probe
