Methods and systems for electrochemically processing microfeature workpieces are described herein. In one embodiment, a process for electrochemically treating a surface of a plurality of microfeature workpieces in an electrochemical treating chamber that includes a processing unit separated from an electrode...http://www.google.com/patents/US7628898?utm_source=gb-gplus-sharePatent US7628898 - Method and system for idle state operation
