A ZnO thin film is fabricated on the c-surface of a sapphire substrate through use of a laser molecular beam epitaxy (MBE) method-which is effective for epitaxial growth of an oxide thin film through control at an atomic level. The thus-formed ZnO thin film has a considerably high crystallinity; the...http://www.google.com/patents/US6057561?utm_source=gb-gplus-sharePatent US6057561 - Optical semiconductor element
