A semiconductor device is provide with a semiconductor substrate, a groove formed in the semiconductor substrate, a gate insulting film formed on the inner wall of the groove, a gate electrode formed in the groove, and a source/drain region and an LDD region arranged in the direction that is substantially...http://www.google.com/patents/US7659571?utm_source=gb-gplus-sharePatent US7659571 - Semiconductor device and method for manufacturing the same
