A semiconductor device fabrication apparatus includes a thermal treatment device for thermally processing a semiconductor substrate, a first oxygen monitor for monitoring the density of oxygen in said thermal treatment device, a load-lock chamber separably coupled to said thermal treatment device for...http://www.google.com/patents/US6444480?utm_source=gb-gplus-sharePatent US6444480 - Thermal treatment apparatus, semiconductor device fabrication apparatus, load-lock chamber, and method of fabricating semiconductor device
