In a settling judgment method for judging whether an object is settled in a target position, the settlement is judged accurately at high-speed. In a positioning device for controlling a position of an object using a position error between a target position and a current position, a plurality of judgment...http://www.google.com/patents/US7460330?utm_source=gb-gplus-sharePatent US7460330 - Settling judgment method for positioning control device and positioning control device
