A silicon penetration device with increased fracture toughness and method of fabrication thereof are provided. The method comprises strengthening silicon penetration devices by thermally growing a silicon oxide layer on the penetration device and then subsequently stripping the silicon oxide. The method...http://www.google.com/patents/US20020176984?utm_source=gb-gplus-sharePatent US20020176984 - Silicon penetration device with increased fracture toughness and method of fabrication
