Disclosed is a method for manufacturing a diamond film of electronic quality at a high rate using a pulsed microwave plasma. The plasma that has a finite volume is formed near a substrate (in a vacuum chamber) by subjecting a gas containing at least hydrogen and carbon to a pulsed discharge. The pulsed...http://www.google.com/patents/US7662441?utm_source=gb-gplus-sharePatent US7662441 - High-speed diamond growth using a microwave plasma in pulsed mode
