A subject pattern and a lower layer pattern are divided into small regions of a constant dimension using identical mesh of division. Considering of the spreading of charged particle beam due to backward scattering, the small region is set to be, for example, a few .mu.m square. An irradiation energy...http://www.google.com/patents/US5667923?utm_source=gb-gplus-sharePatent US5667923 - Charged particle beam exposure compensating proximity effect
