Planarizing pads and methods for making or using planarizing pads to polish or planarize semiconductor wafers, field emission displays, or other microelectronic substrates and substrate assemblies. In one embodiment, the planarizing pad comprises a compressible body and a plurality of discrete contact...http://www.google.com/patents/US6498101?utm_source=gb-gplus-sharePatent US6498101 - Planarizing pads, planarizing machines and methods for making and using planarizing pads in mechanical and chemical-mechanical planarization of microelectronic device substrate assemblies
