A substrate heating apparatus having a chamber, a device for adding gas into the chamber and a substrate heater is provided. The substrate heater is located within the chamber and includes a first plate having a bottom surface. The bottom surface of the first plate has at least one groove. The at least...http://www.google.com/patents/US6054688?utm_source=gb-gplus-sharePatent US6054688 - Hybrid heater with ceramic foil serrated plate and gas assist
