A data management system for reviewing at least one layer of at least one semiconductor wafer is connected to a first inspection device and a second inspection device. The system includes a server which is connected to the first and second inspection devices. A review station is connected to the server....http://www.google.com/patents/US6643006?utm_source=gb-gplus-sharePatent US6643006 - Method and system for reviewing a semiconductor wafer using at least one defect sampling condition
