In the manufacture of an integrated circuit, contaminated oxide is replaced by relatively pure oxide using the following steps. First, a partially manufactured integrated circuit is bathed in an aqueous solution of hydrogen peroxide and ammonium hydroxide to oxidize organic materials and weaken bonds...http://www.google.com/patents/US6429144?utm_source=gb-gplus-sharePatent US6429144 - Integrated circuit manufacture method with aqueous hydrogen fluoride and nitric acid oxide etch
