A capacitor has a tantalum oxynitride film. One method for making the film comprises forming a bottom plate electrode and then forming a tantalum oxide film on the bottom plate electrode. Nitrogen is introduced to form a tantalum oxynitride film. A top plate electrode is formed on the tantalum oxynitride...http://www.google.com/patents/US7206215?utm_source=gb-gplus-sharePatent US7206215 - Antifuse having tantalum oxynitride film and method for making same
