A semiconductor wafer processing system for processing wafers from a wafer storage cassette includes a wafer transfer chamber; a wafer storage elevator within the transfer chamber; one or more wafer processing chambers; and a wafer transfer apparatus for transferring a wafer between a standard storage...http://www.google.com/patents/US5556147?utm_source=gb-gplus-sharePatent US5556147 - Wafer tray and ceramic blade for semiconductor processing apparatus
