A laser irradiation method using a laser crystallization method which can heighten an efficiency of substrate processing as compared to a conventional one and also heighten mobility of a semiconductor film is provided. It is an irradiation method of a laser beam in which, pattern information of a sub-island...http://www.google.com/patents/US7135389?utm_source=gb-gplus-sharePatent US7135389 - Irradiation method of laser beam
