A method and a recording medium for measuring three-dimensional thickness profile and refractive index of transparent dielectric thin-film with some patterns or not, which is fabricated in the semiconductor and related industrial field, using white-light scanning interferometry is provided....http://www.google.com/patents/US6545763?utm_source=gb-gplus-sharePatent US6545763 - Method for measuring a thickness profile and a refractive index using white-light scanning interferometry and recording medium therefor
