A multi-level decoupled micro-actuator device comprising a first level substrate (410), a second level frame (420) stacked on said first level substrate (410), a third level frame (430) stacked on said second level frame (420)....http://www.google.com/patents/US7423794?utm_source=gb-gplus-sharePatent US7423794 - Device and method for stacked multi-level uncoupled electrostatic actuators
