The multi functional cleaning module comprises a plurality of air curtain, an eximer ultraviolet light irradiating device, a brush, a high-speed shower device, and an air knife, where they are arranged continually on a plan and the glass substrates are inserted continually into them. The cleaning apparatus...http://www.google.com/patents/US6564421?utm_source=gb-gplus-sharePatent US6564421 - Multi functional cleaning module of manufacturing apparatus for flat panel display and cleaning apparatus using the same
