In a method for fabricating a nanometer-scale structure by arranging nanotubes in a predetermined direction at a predetermined position, the method for fabricating a nanometer-scale structure comprises a first step of planarizing a substrate by etching a predetermined part by irradiating a focused energy...http://www.google.com/patents/US7476418?utm_source=gb-gplus-sharePatent US7476418 - Method for fabricating nanometer-scale structure
