An ultraviolet (UV) catadioptric imaging system, with broad spectrum correction of primary and residual, longitudinal and lateral, chromatic aberrations for wavelengths extending into the deep UV (as short as about 0.16 .mu.m), comprises a focusing lens group with multiple lens elements that provide...http://www.google.com/patents/US6313467?utm_source=gb-gplus-sharePatent US6313467 - Broad spectrum ultraviolet inspection methods employing catadioptric imaging
