The miniaturizable sensor comprises an insulating substrate (10) supporting first measurement electrode (24) and comprising a flexible measurement arm (18) of conductive or semiconductor material, one end of which is secured to the substrate (10) and the other end of which constitutes a second electrode...http://www.google.com/patents/US5375469?utm_source=gb-gplus-sharePatent US5375469 - Capacitive acceleration sensor and its application in a non-servoed accelerometer
