A micro-mirror array that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a vertical torsion hinge, and a mirror plate, all being fabricated from a single wafer. The micro-mirror array has a large fill ratio. ...http://www.google.com/patents/US20030234994?utm_source=gb-gplus-sharePatent US20030234994 - Reflective spatial light modulator
