Solid state leaf spring pressure transducers are fabricated by batch photolithographic and etching techniques from a monocrystalline material, such as silicon. The leaf spring structures include elongated gaps separating adjacent leaf spring leg portions from each other and from a surrounding support...http://www.google.com/patents/US4021766?utm_source=gb-gplus-sharePatent US4021766 - Solid state pressure transducer of the leaf spring type and batch method of making same
