A split-gate FLASH memory cell is formed with a floating gate that has a tip in the middle of the floating gate. The method of the present invention forms the tip to have a substantially constant radius of curvature, tip angle, and distance to the overlying tunneling oxide. As a result, the tip of the...http://www.google.com/patents/US6861306?utm_source=gb-gplus-sharePatent US6861306 - Method of forming a split-gate memory cell with a tip in the middle of the floating gate
