A mesopump having a plurality of elementary cells and a method of pumping fluids using the mesopump. The cells each have a body forming a cavity having upper and lower electrodes with curved surfaces facing the other electrode. Electrical connections selectively energize the electrodes. A bistable...http://www.google.com/patents/US5836750?utm_source=gb-gplus-sharePatent US5836750 - Electrostatically actuated mesopump having a plurality of elementary cells 
