A spin-on-glass sandwich layer planarization process where the spin-on-glass layer within the sandwich has been ion implanted through its entire thickness. The spin-on-glass sandwich layer is formed by successive deposition of a silicon oxide layer, followed by a spin-on-glass layer. The spin-on-glass...http://www.google.com/patents/US5496776?utm_source=gb-gplus-sharePatent US5496776 - Spin-on-glass planarization process with ion implantation
