A soft spray nozzle discharging a cleaning mist is vertically directed and fixed to an arm. A rinse nozzle discharging rinsing deionized water for suppressing obstruction is vertically fixed to the arm at a prescribed distance from the soft spray nozzle. During cleaning, it follows that both nozzles...http://www.google.com/patents/US7314529?utm_source=gb-gplus-sharePatent US7314529 - Substrate cleaning apparatus and substrate cleaning method
