A masking structure having multiple layers is formed. The masking structure includes an amorphous carbon layer and a cap layer formed over the amorphous carbon layer. The amorphous carbon layer includes transparent amorphous carbon. The cap layer includes non-oxide materials. The masking structure may...http://www.google.com/patents/US7129180?utm_source=gb-gplus-sharePatent US7129180 - Masking structure having multiple layers including an amorphous carbon layer
