A device for coating a disk-like substrate (3,3', . . . ) with the aid of cathodic sputtering, having an essentially cylindrical transport chamber (7) and with a vacuum pump (8) connected to the transport chamber (7) and with an opening (9) that can be closed off by a plate (16) for inserting and removing...http://www.google.com/patents/US6203677?utm_source=gb-gplus-sharePatent US6203677 - Sputtering device for coating an essentially flat disk-shaped substrate
