YAG laser can simultaneously emit a plurality of laser beams having different wavelengths from each other. By simultaneously irradiating the laser beams having different wavelengths from each other to a same region of a non-single crystal semiconductor film, an interference influence is suppressed to...http://www.google.com/patents/US7336685?utm_source=gb-gplus-sharePatent US7336685 - Laser irradiation apparatus, laser irradiation method, and method for manufacturing a semiconductor device
