A capacitor in a semiconductor integrated circuit is fabricated having a fixed charge density introduced near an electrode/dielectric interface. The fixed charge density compensates for the effects of a depletion layer, which would otherwise lower the effective capacitance. By shifting the undesirable...http://www.google.com/patents/US6506645?utm_source=gb-gplus-sharePatent US6506645 - Depletion compensated polysilicon electrodes
