A piezoelectric/electrostrictive actuator including a ceramic substrate, and at least one piezoelectric/electrostrictive actuator unit formed on at least a portion of at least one surface of the substrate, each piezoelectric/electrostrictive actuator unit having a first electrode film, a piezoelectric/electrostrictive...http://www.google.com/patents/US5622748?utm_source=gb-gplus-sharePatent US5622748 - Method of fabricating a piezoelectric/electrostrictive actuator
